Linear Hoist

The Schiller Linear Hoist System provides intrabay transport of almost all wafer cassette types in wafer fabs and automated loading to processing and metrology equipments.

By combining the Schiller Clean Room Transport System with the linear hoist all equipment can be automatically loaded with wafer cassettes in 24/7 operation without any operator assistance.

Energy and data transfer to the gripper device are arranged via the cords of the hoist unit. The high repeatability of the hoist ensures safe and reliable positioning of the wafer cassettes to any equipment load port or to any transfer station with kinematic coupling pins.