Semiconductor Cleanroom Transportation Systems
Semiconductor Cleanroom Transportation Systems
The Schiller Cleanroom Transport System (STS) offers high-availability in a high-performance solution for intralogistics in modern semiconductor factories.
The core is the Schiller Cleanroom Conveyor (CV), consisting of clean-room-tested components and the innovative magnetic drive technology for contact-free, friction-free power transmission to the rollers.
Additional line components supplement the conveyor for the fully-integrated solution for interbay and intrabay transport to cleanrooms up to ISO class 3.
The intelligent system configuration enables quick access to all essential conveyor elements (top/bottom access) and the quick replacement of drive rollers (quick-change).
The Lifting Table (LT) enables safe retrieval and transfer of different boxes to OHT systems. With the cinematic coupling – a positive locking connection with the box–the box can be positioned for transfer to an OHT with repeat accuracy. The electrical connections of the LTare optimized for particles without a drag chain. Like the CV, the power transmission to the drive rollers for the RT takes place via the innovative magnetic drive technology. Additional line components supplement the rotary table for the fully-integrated solution for interbay and intrabay transport to cleanrooms up to ISO class 3. The intelligent system configuration enables quick access to all essential conveyor elements (top/bottom access) and the quick replacement of drive rollers (quick-change).
The Rotary Table (RT) enables quick and efficient control of material flows at the neuralgic points of the intralogistics. The electrical connections are made by rotary feed throughs and are optimized for particles without a drag chain. Like the CV, the power transmission for the RT takes place via the innovative magnetic drive technology. Additional line components supplement the rotary table for the fully integrated solution for interbay and intrabay transport to cleanrooms up to ISO class 3. The intelligent system configuration enables quick access to all essential conveyor elements (top/bottom access) and the quick replacement of drive rollers (quick-change).
The Floor Lift (FL) establishes the connection between the
Cleanroom Transport System and the operator. The Floor Lift can be installed freestanding on the double floor and does not require any connection to the ceiling. The system configuration is optimized for particles and thereby enables use of the FL in environments of ISO class 3.
The FL can be used as a loading/delivery station for the operator and for automated connection of, for example, the Stocker and STS. Versions with/without safe, direct operator access are available, which entails adaptation of the lift speed (SLS=Safe Limited Speed)
The lift and the loading and delivery height can be adapted for the specific customer. The FL can be combined with various system parts (conveyor or rotary table) and enables transfer to conveyor systems in all 4 directions at the upper transfer position.
